Detailed Placement for Enhanced Control of Resist and Etch CDs.
Puneet GuptaAndrew B. KahngChul-Hong ParkPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2007)
Keyphrases
- control system
- real time control
- control strategy
- control theory
- process control
- adaptive control
- optimal control
- image processing
- expert systems
- evolutionary algorithm
- objective function
- vision system
- databases
- dynamic systems
- image sequences
- control method
- control scheme
- decision trees
- control strategies
- control problems
- social networks
- discrete event
- information retrieval