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Wafer Defect Detection Using Directional Morphological Gradient Techniques.

Gongyuan QuSally L. WoodCho Teh
Published in: EURASIP J. Adv. Signal Process. (2002)
Keyphrases
  • defect detection
  • morphological filtering
  • morphological gradient
  • watershed transform
  • feature extraction
  • diffusion tensor images
  • image segmentation
  • mathematical morphology