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Synthesized compact model and experimental results for substrate noise coupling in lightly doped processes.
Hai Lan
Tze Wee Chen
Chi On Chui
Parastoo Nikaeen
Jae Wook Kim
Robert W. Dutton
Published in:
CICC (2005)
Keyphrases
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experimental data
probabilistic model
formal model
computational model
process model
management system
theoretical framework
mathematical model
statistical model
data sets
high level
prior knowledge
cost function
input data
signal to noise ratio
prediction model