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Pneumatic Actuated Linear Peristaltic Micro Pump for Standalone and On-Chip Applications.
Andreas Loth
Ralf Forster
Published in:
NEMS (2018)
Keyphrases
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force control
high speed
low cost
control system
degrees of freedom
linear systems
high density
robot arm
control law
circuit design
vlsi design
analog vlsi
database
learning algorithm
closed loop