Decision-based virtual metrology for advanced process control to empower smart production and an empirical study for semiconductor manufacturing.
Chen-Fu ChienWei-Tse HungChin-Wei PanTran Hong Van NguyenPublished in: Comput. Ind. Eng. (2022)
Keyphrases
- semiconductor manufacturing
- process control
- control system
- discrete event simulation
- product quality
- manufacturing process
- decision making
- decision makers
- intelligent control
- virtual reality
- augmented reality
- decision problems
- decision process
- decision rules
- virtual environment
- virtual world
- control charts
- decision model
- artificial intelligence
- smart objects
- knowledge base