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The application of control chart for defects and defect clustering in IC manufacturing based on fuzzy theory.
Kun-Lin Hsieh
Lee-Ing Tong
Min-Chia Wang
Published in:
Expert Syst. Appl. (2007)
Keyphrases
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fuzzy theory
clustering algorithm
fuzzy clustering
clustering method
defect detection
social networks
knowledge discovery
input output
cluster analysis
data clustering
dynamic model
literature review
fuzzy inference