Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing.

Seong Jin Yim Doo Yong Lee

Published in: J. Intell. Manuf. (1999)

Keyphrases

wafer fabrication
simulated annealing
candidate list
tabu search
dispatching rule
scheduling problem
metaheuristic
genetic algorithm
search algorithm
evolutionary algorithm
neural network
objective function
multi view
single machine