Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability.
Kyotaro NittaMasato SoneHaochun TangChun-Yi ChenTso-Fu Mark ChangDaisuke YamaneShinichi IidaKatsuyuki MachidaHiroyuki ItoKazuya MasuPublished in: IEEE SENSORS (2019)