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Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability.

Kyotaro NittaMasato SoneHaochun TangChun-Yi ChenTso-Fu Mark ChangDaisuke YamaneShinichi IidaKatsuyuki MachidaHiroyuki ItoKazuya Masu
Published in: IEEE SENSORS (2019)
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