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Low-Energy Ion Implantation and Deep-Mesa Si-Avalanche Photodiodes with Improved Fabrication Process.

Tiancai WangHongling PengPeng CaoQiandong ZhuangJie DengJian ChenWanhua Zheng
Published in: Sensors (2024)
Keyphrases
  • low energy
  • data sets
  • electron microscopy
  • high speed
  • minimum energy