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Optical properties of silicon rich silicon oxides obtained by PECVD.

B. DíazJ. A. RodríguezM. RieraAndreu LloberaC. DomínguezJoaquín Tutor-Sánchez
Published in: Microelectron. J. (2004)
Keyphrases
  • optical properties
  • high speed
  • field effect transistors
  • high density
  • high quality
  • computer vision