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Large area recrystallization of thick polysilicon films for low cost partial SOI power devices.
Isabelle Bertrand
Jean-Marie Dilhac
Philippe Renaud
Christian Ganibal
Published in:
Microelectron. J. (2006)
Keyphrases
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low cost
random access memory
embedded systems
rfid tags
power consumption
low power
real time
digital camera
hardware and software
scanning devices
mobile devices
silicon on insulator
databases
multi dimensional
low voltage