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Nonlinearity investigation of the MEMS scanning mirror with electrostatic comb drive.

Peigang DengWei Ma
Published in: NEMS (2014)
Keyphrases
  • hard disk drive
  • image processing
  • computer vision
  • solid state
  • scan data
  • database
  • database systems
  • search engine
  • field of view
  • structured light
  • literature review
  • failure rate