Control of dynamics-coupling effects in piezo-actuator for high-speed AFM operation.

Szuchi Tien Qingze Zou Santosh Devasia

Published in: ACC (2004)

Keyphrases

high speed
control system
control method
nonlinear dynamics
highly nonlinear
neural network
data acquisition
frame rate
real time
control strategies
low power
control algorithm
closed loop
adaptive control
multi agent systems
initial conditions
control theory
genetic algorithm
database
network dynamics