A fast machine learning-based mask printability predictor for OPC acceleration.
Bentian JiangHang ZhangJinglei YangEvangeline F. Y. YoungPublished in: ASP-DAC (2019)
Keyphrases
- machine learning
- neural network
- pattern recognition
- learning tasks
- learning algorithm
- computer vision
- feature selection
- active learning
- text classification
- knowledge acquisition
- machine learning methods
- artificial intelligence
- real time
- training data
- inductive logic programming
- natural language processing
- model selection
- application of machine learning methods
- explanation based learning
- unsupervised learning
- support vector machine
- knowledge representation
- computer science
- information systems