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Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-the-Fly Etching Process Modification.
Daisuke Fukuda
Kenichi Watanabe
Yuji Kanazawa
Masanori Hashimoto
Published in:
IEICE Trans. Fundam. Electron. Commun. Comput. Sci. (2015)
Keyphrases
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three dimensional
databases
neural network
learning algorithm
artificial intelligence
social networks
pattern matching