Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk.

Gaopeng Xue Masaya Toda Xinghui Li Takahito Ono

Published in: NEMS (2021)

Keyphrases

high speed
higher level
high levels
data sets
low cost
input output
databases
information retrieval
computer vision
optical flow
image registration
parallel processing
lower level
high density
vlsi design