Scheduling of single-arm cluster tools with multi-type wafers and shared PMs.

Jipeng Wang Chunrong Pan Hesuan Hu Yuan Zhou

Published in: CASE (2017)

Keyphrases

multi type
multi type relational
data objects
relational data
clustering algorithm
training data
pairwise
reverse nearest neighbor
high level
high dimensional
query processing
co occurrence
multi dimensional
cost model