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Dual-Layer Proton Irradiation for Creating Thermally-Stable High-Resistivity Region in Si CMOS Substrate.
Hans Herdian
Takeshi Inoue
Takuichi Hirano
Masatsugu Sogabe
Atsushi Shirane
Kenichi Okada
Published in:
ESSDERC (2021)
Keyphrases
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