Performance and process characteristic of glass interposer with through-glass-via(TGV).
Chun-Hsien ChienHsun YuChing-Kuan LeeYu-Min LinRen-Shin ChengChau-Jie ZhanPeng-Shu ChenChang-Chih LiuChao-Kai HsuHsiang-Hung ChangHuan-Chun FuYuan-Chang LeeWen-Wei ShenCheng-Ta KoWei-Chung LoYung Jean LuPublished in: 3DIC (2013)