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Failure analysis of a thin-film nitride MEMS package.

Q. LiJ. F. L. GoosenJ. T. M. van BeekFred van KeulenK. L. PhanG. Q. Zhang
Published in: Microelectron. Reliab. (2008)
Keyphrases
  • thin film
  • neural network
  • data analysis
  • query processing
  • fuzzy logic