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Nano-artifact metrics based on random collapse of resist.
Tsutomu Matsumoto
Morihisa Hoga
Yasuyuki Ohyagi
Mikio Ishikawa
Makoto Naruse
Kenta Hanaki
Ryosuke Suzuki
Daiki Sekiguchi
Naoya Tate
Motoichi Ohtsu
Published in:
CoRR (2014)
Keyphrases
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website
nano scale
databases
artificial intelligence
multimedia
database systems
quality metrics
electron microscopy