Hot-Probe method for evaluation of impurities concentration in semiconductors.
Gady GolanAlex AxelevitchB. GorensteinV. ManevychPublished in: Microelectron. J. (2006)
Keyphrases
- evaluation method
- high accuracy
- cost function
- experimental evaluation
- gold standard
- significant improvement
- high precision
- mathematical model
- mutual information
- computational complexity
- fully automatic
- synthetic data
- detection method
- em algorithm
- probabilistic model
- computational cost
- support vector machine svm
- detection algorithm
- computationally efficient
- segmentation method
- dynamic programming
- optimization method
- multiresolution
- data sets