A new experimental methodology using point deflection to quantify residual stress of thin polymer membrane materials in MEMS devices.
Sofiane SoulimaneArnaud PouydebasqueSébastien BolisFabrice JacquetClaudine BridouxFlorian DupontChristophe PoulainStéphane MoreauStephane FangetPublished in: NEMS (2013)