A novel approach for wafer defect pattern classification based on topological data analysis.
Seungchan KoDowan KooPublished in: CoRR (2022)
Keyphrases
- pattern classification
- data analysis
- feature extraction
- pattern recognition
- probabilistic neural network
- nearest neighbor rule
- semiconductor manufacturing
- functional magnetic resonance imaging
- data mining
- radial basis function neural network
- vowel recognition
- machine learning
- fuzzy classifier
- human identification
- parzen window
- mass spectrometry data
- decision trees
- decision boundary
- integrated circuit