Extension of UML and Its Conversion to Petri Nets for Semiconductor Manufacturing Modeling.
MuDer JengWeizhao LuPublished in: ICRA (2002)
Keyphrases
- petri net
- sequence diagrams
- semiconductor manufacturing
- colored petri nets
- stochastic petri net
- discrete event simulation
- state machines
- manufacturing systems
- petri net model
- discrete event systems
- modeling language
- process model
- embedded real time systems
- process control
- ims ld
- service composition
- fuzzy petri net
- unified modeling language
- intermediate representation
- low cost
- object oriented
- web services
- software systems