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Thermo-mechanical design and characterization of low dissipation micro-hotplates operated above 500 °C.

Ferenc BiróCsaba DücsoZoltán HajnalFerenc RieszAndrea Edit PapIstván Bársony
Published in: Microelectron. J. (2014)
Keyphrases
  • mechanical design
  • conceptual design
  • high density
  • databases
  • neural network
  • genetic algorithm
  • high level
  • probabilistic model
  • high levels
  • low signal to noise ratio