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Micromachined high-Q inductors in a 0.18-μm copper interconnect low-k dielectric CMOS process.
Hasnain Lakdawala
Xu Zhu
Hao Luo
Suresh Santhanam
L. Richard Carley
Gary K. Fedder
Published in:
IEEE J. Solid State Circuits (2002)
Keyphrases
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high levels
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image sequences
image processing
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