An information-theory and Virtual Metrology-based approach to Run-to-Run semiconductor manufacturing control.
Gian Antonio SustoAndrea SchirruSimone PampuriGiuseppe De NicolaoAlessandro BeghiPublished in: CASE (2012)
Keyphrases
- information theory
- semiconductor manufacturing
- process control
- information theoretic
- statistical learning
- jensen shannon divergence
- control system
- computer vision
- camera calibration
- multi view
- image registration
- motion estimation
- expert systems
- discrete event simulation
- statistical mechanics
- machine learning
- shannon entropy
- information geometry