films: influence of sputter gas and annealing.

C. L. Heng T. G. Finstad Y. J. Li A. E. Gunnæs A. Olsen P. Storås

Published in: Microelectron. J. (2005)

Keyphrases

genetic algorithm
simulated annealing
grain size
artificial intelligence
information systems
factors that influence
genetic search
database
learning algorithm
similarity measure
artificial neural networks
evolutionary algorithm
control system
individual differences