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films: influence of sputter gas and annealing.
C. L. Heng
T. G. Finstad
Y. J. Li
A. E. Gunnæs
A. Olsen
P. Storås
Published in:
Microelectron. J. (2005)
Keyphrases
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genetic algorithm
simulated annealing
grain size
artificial intelligence
information systems
factors that influence
genetic search
database
learning algorithm
similarity measure
artificial neural networks
evolutionary algorithm
control system
individual differences