Diffusion barrier performance of Zr-N/Zr bilayered film in Cu/Si contact system.

Ying Wang Fei Cao Minghui Ding Yun-Tao Liu

Published in: Microelectron. Reliab. (2008)

Keyphrases

real world
anisotropic diffusion
information retrieval
diffusion process
database
machine learning
information systems
website
edge detection
diffusion processes