Alignment Method for Linear-Scale Projection Lithography Based on CCD Image Analysis.
Dongxu RenZexiang ZhaoJianpu XiBin LiZhengfeng LiHuiying ZhaoLujun CuiHang XuPublished in: Sensors (2018)
Keyphrases
- image analysis
- experimental evaluation
- synthetic data
- preprocessing
- image processing
- closed form
- dynamic programming
- classification method
- scale space
- pattern recognition
- high precision
- support vector machine
- principal axes
- image alignment
- segmentation method
- detection method
- high accuracy
- computational cost
- significant improvement
- objective function
- clustering algorithm