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Multistep virtual metrology approaches for semiconductor manufacturing processes.
Simone Pampuri
Andrea Schirru
Gian Antonio Susto
Cristina De Luca
Alessandro Beghi
Giuseppe De Nicolao
Published in:
CASE (2012)
Keyphrases
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manufacturing processes
camera calibration
process control
product quality
expert systems
manufacturing systems
semiconductor manufacturing
real world
computer vision
knowledge base
image processing
multi agent
virtual environment