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Highly Sensitive Sputtered ZnO: Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection.

Lionel PresmanesYohann ThimontAudrey ChapelleFrédéric BlancChabane TalhiCorine BonningueAntoine BarnabéPhilippe MéniniPhilippe Tailhades
Published in: Sensors (2017)
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