BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms.
Betting WehringRaik HoffmannLukas GerlichMalte CzernohorskyBenjamin UhligRobert SeidelTobias BarchewitzFrank SchlaphofLutz MeinshausenChristoph LeyensPublished in: IRPS (2020)