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Vertical integration of submicron MOSFETs in two separate layers of SOI islands formed by silicon epitaxial lateral overgrowth.
John P. Denton
Sang Woo Pae
Gerold W. Neudeck
Published in:
ACM Great Lakes Symposium on VLSI (2001)
Keyphrases
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low cost
data integration
vlsi circuits
chemical vapor deposition
silicon on insulator
real time
data fusion
multi layer
information integration