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Scanning probe microscopy in semiconductor failure analysis.

Bernd EbersbergerAlexander OlbrichChristian Boit
Published in: Microelectron. Reliab. (2001)
Keyphrases
  • pattern recognition
  • image analysis
  • neural network
  • image processing
  • real time
  • information technology
  • database
  • databases
  • database systems
  • search algorithm
  • high throughput
  • structured light