Mechanical reliability assessment of 28nm Back End of Line (BEoL) stack using finite element analysis and validation.
Kashi Vishwanath MachaniHolm GeislerDirk BreuerFrank KuechenmeisterJens PaulPublished in: IRPS (2015)
Keyphrases
- back end
- finite element analysis
- reliability assessment
- finite element model
- finite element
- user friendly
- bp neural network model
- power system
- data management
- computer aided design
- contact force
- material properties
- data types
- building blocks
- boundary conditions
- friction coefficient
- experimental data
- mechanical properties
- force sensing
- using artificial neural networks
- data analysis
- databases
- optimization methods
- fuzzy logic
- relational databases
- stress distribution
- image processing