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Effect of pre-training to build a regression model using shallow neural network for semiconductor plasma etch process equipment.
Ohyung Kwon
Nayeon Lee
Kangil Kim
Published in:
IEEE BigData (2020)
Keyphrases
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regression model
neural network
prediction model
training process
manufacturing process
training set
regression analysis
process control
feed forward neural networks
kernel regression
artificial neural networks
regression methods