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Strain and stress analysis of the oxide film surface in the chemical mechanical polishing process.

Yeou-Yih LinShip-Peng LoCheng-Yung Chen
Published in: Int. J. Comput. Appl. Technol. (2006)
Keyphrases
  • image analysis
  • object recognition
  • viewpoint
  • finite element analysis
  • web services
  • d objects
  • statistical analysis
  • process model