Cheng-Yung Chen

Publication Activity (10 Years)

Years Active: 2006-2006
Publications (10 Years): 0

Publications

Yeou-Yih Lin, Ship-Peng Lo, Cheng-Yung Chen
Strain and stress analysis of the oxide film surface in the chemical mechanical polishing process. Int. J. Comput. Appl. Technol. 26 (4) (2006)