Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate.
Chien-Hsin HuangChien-Hsing LeeTsung-Min HsiehLi-Chi TsaoShaoyi WuJhyy-Cheng LiouMingyi WangLi-Che ChenMing-Chuen YipWeileun FangPublished in: Sensors (2011)