Optimal feedforward control with a parametric structure applied to a wafer stage.

Yi Jiang Kaiming Yang Yu Zhu Xin Li Dongdong Yu

Published in: J. Syst. Control. Eng. (2014)

Keyphrases

feed forward
control system
adaptive neural
neural nets
optimal control
neural network
artificial neural networks
back propagation
recurrent neural networks
visual cortex
artificial intelligence
object recognition
hidden layer
neural architecture
pwm rectifier