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Frequency-Domain Data-Driven Adaptive Iterative Learning Control Approach: With Application to Wafer Stage.
Xuewei Fu
Xiaofeng Yang
Pericle Zanchetta
Yang Liu
Chenyang Ding
Mi Tang
Zhenyu Chen
Published in:
IEEE Trans. Ind. Electron. (2021)
Keyphrases
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frequency domain
data driven
iterative learning control
spatial domain
fourier transform
cross correlation
feature extraction
power spectrum
frequency domain analysis
multiscale
fourier analysis
subband
spectrum analysis
denoising
adaptive control
image segmentation
iterative learning
neural network
real time