Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity.
Genki YoshikawaTerunobu AkiyamaFrédéric LoizeauKota ShibaSebastian GautschTomonobu NakayamaPeter VettigerNico F. de RooijMasakazu AonoPublished in: Sensors (2012)