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Plasma analysis for the plasma immersion ion implantation processing by a PIC-MCC simulation.
Y. Miyagawa
M. Ikeyama
S. Miyagawa
M. Tanaka
H. Nakadate
Published in:
Comput. Phys. Commun. (2007)
Keyphrases
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high energy
real time
data processing
statistical analysis
artificial intelligence
three dimensional
evolutionary algorithm
virtual environment
virtual world
data acquisition
quantitative analysis
thin film
mathematical analysis
stochastic simulation