H. Nakadate

Publication Activity (10 Years)

Years Active: 2007-2007
Publications (10 Years): 0

Publications

Y. Miyagawa, M. Ikeyama, S. Miyagawa, M. Tanaka, H. Nakadate
Plasma analysis for the plasma immersion ion implantation processing by a PIC-MCC simulation. Comput. Phys. Commun. 177 (1-2) (2007)