Branch selection and data optimization for selecting machines for processes in semiconductor manufacturing using AI-based predictions.
Peter StichRebecca BuschMichael G. WahlChristian WeberMadjid FathiPublished in: EIT (2021)
Keyphrases
- data sets
- data analysis
- data collection
- data processing
- semiconductor manufacturing
- raw data
- data points
- data quality
- original data
- data structure
- synthetic data
- database
- data mining techniques
- data management
- optimization algorithm
- statistical analysis
- input data
- optimization problems
- case based reasoning
- small number
- training data
- artificial intelligence
- genetic algorithm
- real time