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A Study on Si(100) Surface Flattening Utilizing Sacrificial Oxidation Process and Its Effect on MIS Diode Characteristics.
Sohya Kudoh
Shun'ichiro Ohmi
Published in:
IEICE Trans. Electron. (2015)
Keyphrases
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neural network
empirical studies
case study
viewpoint
software engineering
computer simulation
theoretical framework
main factors