Influence of sample preparation on intrinsic stresses inside a model Chip - First results of partial decapsulation.
T. SchaffusP. AlbertW. BreuerD. DebieM. GramlC. HollerithF. KroningerW. MackH. PfaffM. SchaffusJ. WalterPublished in: Microelectron. Reliab. (2018)