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Influence of sample preparation on intrinsic stresses inside a model Chip - First results of partial decapsulation.

T. SchaffusP. AlbertW. BreuerD. DebieM. GramlC. HollerithF. KroningerW. MackH. PfaffM. SchaffusJ. Walter
Published in: Microelectron. Reliab. (2018)
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