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Systematic applications of multivariate analysis to monitoring of equipment health in semiconductor manufacturing.
An-Guo Chao
S. T. Tseng
David Shan-Hill Wong
Shi-Shang Jang
Shui-Pin Lee
Published in:
WSC (2008)
Keyphrases
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semiconductor manufacturing
discrete event simulation
early warning
process control
health monitoring
monitoring system
medical care
real time
health status
continuous monitoring
vital signs
production system
control system
chronic disease
dynamic systems
health care
sensor data